How Long to Read Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication

How Long Does it Take to Read Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication?

It takes the average reader 5 hours and 36 minutes to read Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication by Jianfeng Luo

Assuming a reading speed of 250 words per minute. Learn more

Description

Chemical mechanical planarization, or chemical mechanical polishing as it is simultaneously referred to, has emerged as one of the critical processes in semiconductor manufacturing and in the production of other related products and devices, MEMS for example. Since its introduction some 15+ years ago CMP, as it is commonly called, has moved steadily into new and challenging areas of semiconductor fabrication. Demands on it for consistent, efficient and cost-effective processing have been steady. This has continued in the face of steadily decreasing feature sizes, impressive increases in wafer size and a continuing array of new materials used in devices today. There are a number of excellent existing references and monographs on CMP in circulation and we defer to them for detailed background information. They are cited in the text. Our focus here is on the important area of process mod els which have not kept pace with the tremendous expansion of applications of CMP. Preston's equation is a valuable start but represents none of the subtleties of the process. Specifically, we refer to the development of models with sufficient detail to allow the evaluation and tradeoff of process inputs and parameters to assess impact on quality or quantity of production. We call that an "integrated model" and, more specifically, we include the important role of the mechanical elements of the process.

How long is Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication?

Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication by Jianfeng Luo is 327 pages long, and a total of 84,039 words.

This makes it 110% the length of the average book. It also has 103% more words than the average book.

How Long Does it Take to Read Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication Aloud?

The average oral reading speed is 183 words per minute. This means it takes 7 hours and 39 minutes to read Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication aloud.

What Reading Level is Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication?

Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication is suitable for students ages 12 and up.

Note that there may be other factors that effect this rating besides length that are not factored in on this page. This may include things like complex language or sensitive topics not suitable for students of certain ages.

When deciding what to show young students always use your best judgement and consult a professional.

Where Can I Buy Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication?

Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication by Jianfeng Luo is sold by several retailers and bookshops. However, Read Time works with Amazon to provide an easier way to purchase books.

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