It takes the average reader 2 hours and 24 minutes to read Modeling of Chemical Vapor Deposition of Tungsten Films by Chris R. Kleijn
Assuming a reading speed of 250 words per minute. Learn more
Semiconductor equipment modeling has in recent years become a field of great interest, because it offers the potential to support development and optimization of manufacturing equipment and hence reduce the cost and improve the quality of the reactors. This book is the result of two parallel lines of research dealing with the same subject - Modeling of Tungsten CVD processes -, which were per formed independently under very different boundary conditions. On the one side, Chris Kleijn, working in an academic research environment, was able to go deep enough into the subject to laya solid foundation and prove the validity of all the assumptions made in his work. On the other side, Christoph Werner, working in the context of an industrial research lab, was able to closely interact with manufacturing and development engineers in a modern submicron semiconductor processing line. Because of these different approaches, the informal collaboration during the course of the projects proved to be extremely helpful to both sides, even though - or perhaps because - different computer codes, different CVD reactors and also slightly different models were used. In spite of the inconsistencies which might arise from this double approach, we feel that the presentation of both sets of results in one book will be very useful for people working in similar projects.
Modeling of Chemical Vapor Deposition of Tungsten Films by Chris R. Kleijn is 139 pages long, and a total of 36,001 words.
This makes it 47% the length of the average book. It also has 44% more words than the average book.
The average oral reading speed is 183 words per minute. This means it takes 3 hours and 16 minutes to read Modeling of Chemical Vapor Deposition of Tungsten Films aloud.
Modeling of Chemical Vapor Deposition of Tungsten Films is suitable for students ages 10 and up.
Note that there may be other factors that effect this rating besides length that are not factored in on this page. This may include things like complex language or sensitive topics not suitable for students of certain ages.
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